Laser Scanning Profilometry (LSP) - NanoFocus®
The NanoFocus µscan® is a modular 3D profilometer system for non-contact surface characterization in the micrometer and nanometer ranges. The advanced software concept allows automated measurement tasks on the shop floor, but also has applications in laboratory research and development. A variety of inter-changeable sensors offers a range of advantages and is adaptable to many different measurement problems involving flatness and simultaneous roughness measurements. Visit the NanoFocus website for more information.
Modules
Sensor Module: The confocal point sensor with its high dynamic range is ideal for applications in MEMS and micro-electronics and is able to address very steep profile flanks.
- model CF4
- 0.02um Z resolution
- 1um X-Y resolution
- 4mm working distance
- 1mm measuring range.
Scan Module: Servo-contolled X-Y stage control.
- model SC50/100
- 0.5um X-Y resolution
- 50mm X range
- 100mm Y range
- 100mm Z positioning
- 50mm/sec measuring speed.
Applications
IC-Packaging/SMT: Fast automatic capture of warpage, lead and BGA coplanarity, laser marking, solder paste volume.
Thick Film Hybrids: Automatable measurement of film thickness on ceramic sub-strates, substrate warp and print stretch even on freshly printed paste.
Precision Parts: Measurement of form, waviness and roughness compliant with DIN EN ISO for precision metal parts, plastics and semiconductor materials.
